JPH0325235U - - Google Patents

Info

Publication number
JPH0325235U
JPH0325235U JP8598289U JP8598289U JPH0325235U JP H0325235 U JPH0325235 U JP H0325235U JP 8598289 U JP8598289 U JP 8598289U JP 8598289 U JP8598289 U JP 8598289U JP H0325235 U JPH0325235 U JP H0325235U
Authority
JP
Japan
Prior art keywords
substrate
substrate chuck
processing apparatus
wafer type
type wet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8598289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8598289U priority Critical patent/JPH0325235U/ja
Publication of JPH0325235U publication Critical patent/JPH0325235U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP8598289U 1989-07-21 1989-07-21 Pending JPH0325235U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8598289U JPH0325235U (en]) 1989-07-21 1989-07-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8598289U JPH0325235U (en]) 1989-07-21 1989-07-21

Publications (1)

Publication Number Publication Date
JPH0325235U true JPH0325235U (en]) 1991-03-15

Family

ID=31635383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8598289U Pending JPH0325235U (en]) 1989-07-21 1989-07-21

Country Status (1)

Country Link
JP (1) JPH0325235U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100396572C (zh) * 2002-09-04 2008-06-25 石崎资材株式会社 具有止回阀功能的压缩收容袋
JP2015023138A (ja) * 2013-07-18 2015-02-02 株式会社ディスコ スピンナ洗浄装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100396572C (zh) * 2002-09-04 2008-06-25 石崎资材株式会社 具有止回阀功能的压缩收容袋
JP2015023138A (ja) * 2013-07-18 2015-02-02 株式会社ディスコ スピンナ洗浄装置

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